Comparison of Different Copper Nitride Passivation Layers Fabrication Methodology and Optimal Growth Condition for Low Temperature Copper-to-Copper Bonding in Advanced Packaging

Chiao Yen Wang, Tzu Heng Hung, Ping Jung Liu, Kuan Neng Chen*

*此作品的通信作者

研究成果: Conference contribution同行評審

2 引文 斯高帕斯(Scopus)

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Keyphrases

Engineering

Material Science