COMPARISON OF CW LASER AND ELECTRON-BEAM RECRYSTALLIZATION OF POLYSILICON IN MULTILAYER STRUCTURES.

C. I. Drowley; Chen-Ming Hu

doi:10.1557/PROC-13-529

COMPARISON OF CW LASER AND ELECTRON-BEAM RECRYSTALLIZATION OF POLYSILICON IN MULTILAYER STRUCTURES.

C. I. Drowley^*, Chen-Ming Hu

^*此作品的通信作者

國際半導體產業學院

研究成果: Conference contribution › 同行評審

原文	English
主出版物標題	Materials Research Society Symposia Proceedings
編輯	Jaydish Narayan, Walter Lyons Brown, Ross A. Lemons
頁面	529-534
頁數	6
DOIs	https://doi.org/10.1557/PROC-13-529
出版狀態	Published - 1 12月 1983

出版系列

名字	Materials Research Society Symposia Proceedings
卷	13
ISSN（列印）	0272-9172

存取文件

10.1557/PROC-13-529

其它文件與鏈接

Link to publication in Scopus

引用此

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title = "COMPARISON OF CW LASER AND ELECTRON-BEAM RECRYSTALLIZATION OF POLYSILICON IN MULTILAYER STRUCTURES.",

author = "Drowley, {C. I.} and Chen-Ming Hu",

year = "1983",

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language = "English",

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series = "Materials Research Society Symposia Proceedings",

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COMPARISON OF CW LASER AND ELECTRON-BEAM RECRYSTALLIZATION OF POLYSILICON IN MULTILAYER STRUCTURES. / Drowley, C. I.; Hu, Chen-Ming.

Materials Research Society Symposia Proceedings. 編輯 / Jaydish Narayan; Walter Lyons Brown; Ross A. Lemons. 1983. p. 529-534 (Materials Research Society Symposia Proceedings; 卷 13).

研究成果: Conference contribution › 同行評審

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M3 - Conference contribution

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