The effect of composition (phase), texture, microstructure and thickness on electrical properties of Pb(Zr1-xTix)O3 (PZT) films have been evaluated. Zr-rich PZT films with  texture have a higher remanent polarization and dielectric constant, but a lower coercive field as compared with PZT films. Ti-rich PZT films with  texture have a higher dielectric constant, but a lower remanent polarizalion and coercive field as compared with PZT films. Near the morphotropic phase boundary (MPB) composition, films with a mixed texture of  and  have a higher dielectric constant than PZT and PZT films even though the values of remanent polarization and coercive field of the mixed textured films are in between those of the other two films. Both remanent and saturation polarization are independent of film thickness, whereas dielectric constant decreases but coercive field increases at very small thickness.
|頁（從 - 到）||4451-4458|
|期刊||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|出版狀態||Published - 7月 1997|