Combined effects of nitrogen implantation at S/D extension and N 2O oxide on 0.18 μm N- and P-metal oxide field effect transistors (MOSFETs)

Tien-Sheng Chao, Sun Jay Chang, Chao-Hsin Chien, Horng-Chih Lin, Tiao Yuan Huang, Chun Yen Chang

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Engineering & Materials Science

Physics & Astronomy