@inproceedings{318046d7933c48f1a19a2a7a53bf9aee,
title = "Combination with optical lithography and microwave rapid heating method for the selective-area synthesis of silver nanoparticles on silicon wafer",
abstract = "The selective area synthesis of silver nanoparticles on silicon wafer using a combination of optical lithography and microwave rapid heating method was investigated. This approach utilize mono-disperse gold nanoparticles self-assembly attached on the pre-pattern 3-aminopropyltrimethoxysilane (APTMS) surface modified of silicon substrates by spin coating method. The surfaces of gold nanoparticles served as growing seeds for silver nanoparticles. The SEM image revealed that well-scattered and highly densed silver nanoparticles thin film was synthesized using the method.",
author = "Huang, {Pei Wen} and Liu, {Fu Ken} and Fu-Hsiang Ko and Chu, {Tieh Chi}",
year = "2004",
month = dec,
day = "1",
doi = "10.1109/IMNC.2004.245811",
language = "English",
isbn = "4990247205",
series = "Digest of Papers - Microprocesses and Nanotechnology 2004",
pages = "230--231",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2004",
note = "2004 International Microprocesses and Nanotechnology Conference ; Conference date: 26-10-2004 Through 29-10-2004",
}