CMOS SPAD Imager Array for Wide Radiation Temperature Sensing and Thermal Imaging

Hui Chen Tsai; Chun Hsien Liu; Sheng Di Lin; Chia Ming Tsai; Jau Yang Wu

doi:10.1109/JSEN.2022.3206116

CMOS SPAD Imager Array for Wide Radiation Temperature Sensing and Thermal Imaging

Hui Chen Tsai, Chun Hsien Liu, Sheng Di Lin, Chia Ming Tsai, Jau Yang Wu^*

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電子研究所

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4 引文斯高帕斯（Scopus）

摘要

We have demonstrated a wide radiation temperature measurement by using a single-photon avalanche diode (SPAD) image array that is analogous to a silicon photomultiplier with a time-gating technique and an adjustable summed output. The detection temperature window ranging from 280 °C to 1050 °C can be achieved with a noise equivalent temperature difference (NETD) value of below 1 °C. The thermal image with a high detection rate up to 1680 Hz is obtained at the same detection temperature as a commercial CMOS thermal camera. We further demonstrate a thermal image with a spatial resolution of 80μm.

原文	English
頁（從 - 到）	20230-20237
頁數	8
期刊	IEEE Sensors Journal
卷	22
發行號	21
DOIs	https://doi.org/10.1109/JSEN.2022.3206116
出版狀態	Published - 1 11月 2022

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abstract = "We have demonstrated a wide radiation temperature measurement by using a single-photon avalanche diode (SPAD) image array that is analogous to a silicon photomultiplier with a time-gating technique and an adjustable summed output. The detection temperature window ranging from 280 °C to 1050 °C can be achieved with a noise equivalent temperature difference (NETD) value of below 1 °C. The thermal image with a high detection rate up to 1680 Hz is obtained at the same detection temperature as a commercial CMOS thermal camera. We further demonstrate a thermal image with a spatial resolution of 80μm.",

keywords = "Radiometry, single-photon avalanche diode (SPAD)",

author = "Tsai, {Hui Chen} and Liu, {Chun Hsien} and Lin, {Sheng Di} and Tsai, {Chia Ming} and Wu, {Jau Yang}",

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AU - Tsai, Hui Chen

AU - Liu, Chun Hsien

AU - Lin, Sheng Di

AU - Tsai, Chia Ming

AU - Wu, Jau Yang

PY - 2022/11/1

Y1 - 2022/11/1

N2 - We have demonstrated a wide radiation temperature measurement by using a single-photon avalanche diode (SPAD) image array that is analogous to a silicon photomultiplier with a time-gating technique and an adjustable summed output. The detection temperature window ranging from 280 °C to 1050 °C can be achieved with a noise equivalent temperature difference (NETD) value of below 1 °C. The thermal image with a high detection rate up to 1680 Hz is obtained at the same detection temperature as a commercial CMOS thermal camera. We further demonstrate a thermal image with a spatial resolution of 80μm.

AB - We have demonstrated a wide radiation temperature measurement by using a single-photon avalanche diode (SPAD) image array that is analogous to a silicon photomultiplier with a time-gating technique and an adjustable summed output. The detection temperature window ranging from 280 °C to 1050 °C can be achieved with a noise equivalent temperature difference (NETD) value of below 1 °C. The thermal image with a high detection rate up to 1680 Hz is obtained at the same detection temperature as a commercial CMOS thermal camera. We further demonstrate a thermal image with a spatial resolution of 80μm.

KW - Radiometry

KW - single-photon avalanche diode (SPAD)

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CMOS SPAD Imager Array for Wide Radiation Temperature Sensing and Thermal Imaging

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