@inproceedings{05cabd86bd9940b3a68ee13ec3da0d20,
title = "CMOS MEMS Resonator for Physical Reservoir Computing",
abstract = "This paper presents a CMOS-MEMS clamped-clamped (CC) beam for physical reservoir computing. The device is designed and fabricated in the CMOS back-end-of-line (BEOL) metal and oxide layers. The resonant beam is electrostatically actuated to operate in the nonlinear states for delay-based physical reservoir computing. The closed-loop reservoir computing is realized by the nonlinear CC beam, a field programmable gate array (FPGA) controller, and a lock-in amplifier. The fabricated and post-processed CMOS MEMS device were characterized. Preliminary parity benchmark tests in different test conditions are presented.",
keywords = "CMOS MEMS, FPGA, clamped-clamped beam, parity benchmark, physical reservoir computing",
author = "Yi Chiu and Tsai, {Fang Wei} and Wang, {Liang Kai} and Lee, {Yuan Chieh} and Manu Garg and Hong, {Hao Chiao}",
note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 2023 IEEE SENSORS, SENSORS 2023 ; Conference date: 29-10-2023 Through 01-11-2023",
year = "2023",
doi = "10.1109/SENSORS56945.2023.10325281",
language = "English",
series = "Proceedings of IEEE Sensors",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2023 IEEE SENSORS, SENSORS 2023 - Conference Proceedings",
address = "美國",
}