Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes

Jin-Chern Chiou*, Y. C. Lin, S. D. Wu

*此作品的通信作者

研究成果: Conference contribution同行評審

11 引文 斯高帕斯(Scopus)

摘要

The micromirror device that can achieve analog behavior plays a very important role in optical MEMS. However, traditional electrostatic micromirror device driven by a single electrode can not achieve the analog behavior due to its nonlinear transfer characteristic. In this regard, the concept of multiple-electrodes-controlled mirror device is proposed previously to overcome the above mentioned drawback. The experimental results have motivated us to make more efforts to improve the performance such as operating frequency of the proposed micromirror device. In order to increase the operating frequency, the transient behavior of the mirror must be improved first. In this article, we show that fuzzy control technology is a good candidate to improve the transient behavior of the proposed device.

原文English
主出版物標題2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
發行者Institute of Electrical and Electronics Engineers Inc.
頁面85-86
頁數2
ISBN(電子)0780375955, 9780780375956
DOIs
出版狀態Published - 20 8月 2002
事件IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland
持續時間: 20 8月 200223 8月 2002

出版系列

名字2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
國家/地區Switzerland
城市Lugano
期間20/08/0223/08/02

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