Characterization of polysilicon oxides thermally grown and deposited on the polished polysilicon films

Tan Fu Lei, Juing Yi Cheng, Shyh Yin Shiau, Tien-Sheng Chao, Chao Sung Lai

研究成果: Article同行評審

20 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds