Characterization and modeling of metal-film microbolometer

Jin Shown Shie*, Yeong Maw Chen, Yang-Mang Ou, Bruce C.S. Chou

*此作品的通信作者

研究成果: Article同行評審

75 引文 斯高帕斯(Scopus)

摘要

The characteristic thermal parameters of a platinum-film microbolometer are extracted from the data of two measuring methods. A simple and accurate equivalent circuit model, along with its thermal behavior, is proposed for the device. Applying the model to simulate some device circuits results in good agreement with the experimental data. Furthermore, an effective method of ambient temperature compensation, proposed previously by our laboratory, is demonstrated both experimentally and by simulation using the same model. The established electro-thermal model therefore serves as an useful tool for SPICE simulations in the design of microbolometers. [122].

原文English
頁(從 - 到)298-306
頁數9
期刊Journal of Microelectromechanical Systems
5
發行號4
DOIs
出版狀態Published - 12月 1996

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