Characterization and lithographic parameters extraction for the modified resists

Fu-Hsiang Ko*, June Kuen Lu, Tieh Chi Chu, Tiao Yuan Huang, Chin Cheng Yang, Jinn Tsair Sheu, Hui Ling Huang

*此作品的通信作者

研究成果: Conference article同行評審

1 引文 斯高帕斯(Scopus)

指紋

深入研究「Characterization and lithographic parameters extraction for the modified resists」主題。共同形成了獨特的指紋。

Keyphrases

Material Science