Characteristics variability of novel lateral asymmetry nano-MOSFETs due to random discrete dopant

Kou Fu Lee*, Chih Hong Hwang, Tien Yeh Li, Yi-Ming Li

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

In nanoseale silicon FETs, the lateral asymmetric channel (LAC) devices with higher channel doping concentration near the source-end have shown better control of the short channel effects. However, such asymmetric doping profile may introduce different fluctuations in device characteristics. In this paper, the asymmetric sketch of random dopants distribution near source and drain sides in 16 nm bulk MOSFETs' channel is explored. Discrete dopants distributed near-source end and near-drain end of channel region induce rather different fluctuations of gate capacitance and high frequency characteristics. The proposed inverse lateral asymmetry doping profile can effectively suppress both the DC and high frequency characteristic fluctuations, which may benefit the design of sub-20-nm MOSFETs.

原文American English
主出版物標題Nanotechnology 2009
主出版物子標題Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
頁面602-605
頁數4
出版狀態Published - 3 5月 2009
事件Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009 - Houston, TX, 美國
持續時間: 3 5月 20097 5月 2009

出版系列

名字Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - Technical Proceedings of the 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
1

Conference

ConferenceNanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics - 2009 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2009
國家/地區美國
城市Houston, TX
期間3/05/097/05/09

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