Characteristics of sputtered TaX absorbers for X-ray mask

Jeng-Tzong Sheu*, A. Chu, J. H. Ding, S. Su

*此作品的通信作者

研究成果: Conference article同行評審

2 引文 斯高帕斯(Scopus)

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Mathematics

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds