Characteristics of Boron Diffusion in Polysilicon/Silicon Systems with a Thin Si-B Layer as Diffusion Source

T. P. Chen, T. F. Lei, Horng-Chih Lin, C. Y. Chang

研究成果: Article › 同行評審

5 引文 斯高帕斯（Scopus）

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Keyphrases

Material Science

Engineering

Biochemistry, Genetics and Molecular Biology

Chemical Engineering