Characteristics of Ba(Mg1/3Ta2/3)O3 thin films prepared by pulsed laser deposition process and their effect on the growth of Pb(Zr1-xTix)O3 thin films

I. Nan Lin*, Chen Wei Liang, Ying-hao Chu, Su Jien Lin

*此作品的通信作者

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6 引文 斯高帕斯(Scopus)

摘要

The growth behavior of Ba(Mg1/3Ta2/3)O3 (BMT) thin films on bare or Pt-coated silicon substrates and their buffering effect on the subsequently deposited Pb(Zr,Ti)O3 (PZT) films were systematically examined. The preferred orientation of BMT layer varies pronouncedly with the deposition parameters. It is (200) textured when deposited under high substrate temperature (400°C) or large laser fluence (3 J/cm2). The BMT layer not only suppresses the film-to-substrate interdiffusion but also enhances the Pb(Zr1-xTix)O 3 (PZT) nucleation kinetics. The PZT films prepared on BMT layer by metal-organic-decomposition (MOD) process begin to crystallize at a substrate temperature as low as 400°C, which is lower than the reported heat treatment temperature for preparing PZT films via MOD process. However, postannealing at 550°C is required to fully crystallize the PZT films. The PZT/BMT/Pt(Si) thin films show high dielectric constant [(εr)PZT=400-425], low leakage current density (Je<2 × 10-7 A/cm 2), and good ferroelectric properties (Pr = 15 μC/cm2, Ec=157 kV/cm), while the PZT/BMT/Si thin films exhibit a large optical refractive index (nPZT/BMT/si=2.4).

原文English
頁(從 - 到)5701-5705
頁數5
期刊Journal of Applied Physics
96
發行號10
DOIs
出版狀態Published - 15 十一月 2004

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