摘要
The performances of flexible a-Si:H TFTs on stainless foil with and without silicon nitride passivation layer were discussed in this study. The experiment results indicated the reliability of a-Si:H TFTs with passivation layer under mechanical strains was improved. That's related to the hydrogen passivating effect during deposition and post-annealing process.
原文 | English |
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頁面 | 2207-2209 |
頁數 | 3 |
出版狀態 | Published - 1 12月 2010 |
事件 | 17th International Display Workshops, IDW'10 - Fukuoka, Japan 持續時間: 1 12月 2010 → 3 12月 2010 |
Conference
Conference | 17th International Display Workshops, IDW'10 |
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國家/地區 | Japan |
城市 | Fukuoka |
期間 | 1/12/10 → 3/12/10 |