Carrier transportation mechanism of the TaN/HfO2/IL/Si structure with silicon surface fluorine implantation

Woei Cherng Wu, Chao Sung Lai*, Tzu Ming Wang, Jer Chyi Wang, Chih Wei Hsu, Ming Wen Ma, Wen Cheng Lo, Tien-Sheng Chao

*此作品的通信作者

研究成果: Article › 同行評審

27 引文 斯高帕斯（Scopus）

指紋

深入研究「Carrier transportation mechanism of the TaN/HfO2/IL/Si structure with silicon surface fluorine implantation」主題。共同形成了獨特的指紋。

Engineering & Materials Science

Chemical Compounds