BEOL-Compatible Ferroelectric Capacitor with Excellent Endurance and Retention by Improving Interface Quality

Keyphrases

• Annealing 50%
• Atomic Layer Deposition 50%
• Back-end-of-line 100%
• Capacitors 50%
• Endurance Test 50%
• Ferroelectric Capacitor 100%
• Interface Quality 100%
• Line Integration 50%
• Molybdenum 50%
• Molybdenum Electrode 50%
• Operating Voltage 50%
• Ultrathin 50%

Material Science

• Capacitor 100%
• Ferroelectric Material 100%
• Ferroelectricity 50%
• Molybdenum 100%
• Oxidation Reaction 50%

Engineering

• Atomic Layer Deposition 100%
• Operating Voltage 100%