Beam shaping with diffractive optics for laser micro-machining of plastics with a femtosecond laser

Kittichai Sojiphan*, Miranda Marcus, Hae Woon Choi, Chunmeng Lu, Avraham Benatar, Dave F. Farson, L. James Lee

*此作品的通信作者

研究成果: Paper同行評審

摘要

Microfluidic devices and micro-electro-mechanical systems (MEMS) have become one of the most interesting and important applications in biotechnology, biomedical, pharmaceutical, life sciences, and agriculture. Research in manufacturing technologies used to fabricate these devices is important for improved quality as well as for time and cost savings during mass productions. A new approach for the fabrication of these MEMS devices is the laser ablation using diffractive optics elements (DOE) for beam shaping. In results described in this report, a 775 nm-wavelength high power femtosecond laser was used to ablate circular channels on polystyrene specimens. This approach to creating channels in the polystyrene was found to be promising even though the DOE used was not optimized for the femtosecond laser wavelength.

原文English
頁面2296-2299
頁數4
出版狀態Published - 5月 2006
事件Society of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006 - Charlotte, NC, United States
持續時間: 7 5月 200611 5月 2006

Conference

ConferenceSociety of Plastics Engineers Annual Technical Conference 2006, ANTEC 2006
國家/地區United States
城市Charlotte, NC
期間7/05/0611/05/06

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