Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications

Y. C. Su; C. C. Chiou; V. Marinova; Shiuan-Huei Lin; N. Bozhinov; B. Blagoev; T. Babeva; Ken-Yuh Hsu; D. Z. Dimitrov

doi:10.1007/s11082-018-1469-1

Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications

Y. C. Su, C. C. Chiou, V. Marinova, Shiuan-Huei Lin, N. Bozhinov^*, B. Blagoev, T. Babeva, Ken-Yuh Hsu, D. Z. Dimitrov

^*此作品的通信作者

研究成果: Article › 同行評審

29 引文斯高帕斯（Scopus）

摘要

Aluminum-doped zinc oxide (AZO) layers are prepared by using atomic layer deposition technique. The obtained layers possess high optical transmittance at visible and near-infrared spectral range. By varying the Al content, optimal growth compositions of AZO are established where the electrical conductivity of the film is highest. Based on performed optical and electrical characteristics measurements, selected AZO films with optimal conductivity are implemented as transparent electrodes in liquid crystal display devices. The electro-optical modulation characteristics of these devices are found to be comparable to those of devices using commercial ITO electrodes.

原文	English
文章編號	205
頁（從 - 到）	1-7
頁數	7
期刊	Optical and Quantum Electronics
卷	50
發行號	5
DOIs	https://doi.org/10.1007/s11082-018-1469-1
出版狀態	Published - 1 5月 2018

存取文件

10.1007/s11082-018-1469-1

其它文件與鏈接

Link to publication in Scopus

引用此

@article{a9219738a3be48b28c2979f0de451a57,

title = "Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications",

abstract = "Aluminum-doped zinc oxide (AZO) layers are prepared by using atomic layer deposition technique. The obtained layers possess high optical transmittance at visible and near-infrared spectral range. By varying the Al content, optimal growth compositions of AZO are established where the electrical conductivity of the film is highest. Based on performed optical and electrical characteristics measurements, selected AZO films with optimal conductivity are implemented as transparent electrodes in liquid crystal display devices. The electro-optical modulation characteristics of these devices are found to be comparable to those of devices using commercial ITO electrodes.",

keywords = "Al-doped ZnO layers, ALD technique, Liquid crystal displays, Transparent conductive layers",

author = "Su, {Y. C.} and Chiou, {C. C.} and V. Marinova and Shiuan-Huei Lin and N. Bozhinov and B. Blagoev and T. Babeva and Ken-Yuh Hsu and Dimitrov, {D. Z.}",

year = "2018",

month = may,

day = "1",

doi = "10.1007/s11082-018-1469-1",

language = "English",

volume = "50",

pages = "1--7",

journal = "Optical and Quantum Electronics",

issn = "0306-8919",

publisher = "Springer",

number = "5",

}

TY - JOUR

T1 - Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications

AU - Su, Y. C.

AU - Chiou, C. C.

AU - Marinova, V.

AU - Lin, Shiuan-Huei

AU - Bozhinov, N.

AU - Blagoev, B.

AU - Babeva, T.

AU - Hsu, Ken-Yuh

AU - Dimitrov, D. Z.

PY - 2018/5/1

Y1 - 2018/5/1

N2 - Aluminum-doped zinc oxide (AZO) layers are prepared by using atomic layer deposition technique. The obtained layers possess high optical transmittance at visible and near-infrared spectral range. By varying the Al content, optimal growth compositions of AZO are established where the electrical conductivity of the film is highest. Based on performed optical and electrical characteristics measurements, selected AZO films with optimal conductivity are implemented as transparent electrodes in liquid crystal display devices. The electro-optical modulation characteristics of these devices are found to be comparable to those of devices using commercial ITO electrodes.

AB - Aluminum-doped zinc oxide (AZO) layers are prepared by using atomic layer deposition technique. The obtained layers possess high optical transmittance at visible and near-infrared spectral range. By varying the Al content, optimal growth compositions of AZO are established where the electrical conductivity of the film is highest. Based on performed optical and electrical characteristics measurements, selected AZO films with optimal conductivity are implemented as transparent electrodes in liquid crystal display devices. The electro-optical modulation characteristics of these devices are found to be comparable to those of devices using commercial ITO electrodes.

KW - Al-doped ZnO layers

KW - ALD technique

KW - Liquid crystal displays

KW - Transparent conductive layers

UR - http://www.scopus.com/inward/record.url?scp=85045840186&partnerID=8YFLogxK

U2 - 10.1007/s11082-018-1469-1

DO - 10.1007/s11082-018-1469-1

M3 - Article

AN - SCOPUS:85045840186

SN - 0306-8919

VL - 50

SP - 1

EP - 7

JO - Optical and Quantum Electronics

JF - Optical and Quantum Electronics

IS - 5

M1 - 205

ER -

Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications

摘要

存取文件

其它文件與鏈接

指紋

引用此