Atomic layer deposition prepared Al-doped ZnO for liquid crystal displays applications

Y. C. Su, C. C. Chiou, V. Marinova, Shiuan-Huei Lin, N. Bozhinov*, B. Blagoev, T. Babeva, Ken-Yuh Hsu, D. Z. Dimitrov

*此作品的通信作者

研究成果: Article同行評審

18 引文 斯高帕斯(Scopus)

摘要

Aluminum-doped zinc oxide (AZO) layers are prepared by using atomic layer deposition technique. The obtained layers possess high optical transmittance at visible and near-infrared spectral range. By varying the Al content, optimal growth compositions of AZO are established where the electrical conductivity of the film is highest. Based on performed optical and electrical characteristics measurements, selected AZO films with optimal conductivity are implemented as transparent electrodes in liquid crystal display devices. The electro-optical modulation characteristics of these devices are found to be comparable to those of devices using commercial ITO electrodes.

原文English
文章編號205
頁(從 - 到)1-7
頁數7
期刊Optical and Quantum Electronics
50
發行號5
DOIs
出版狀態Published - 1 5月 2018

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