Atomic layer-deposited al-doped ZnO thin films for display applications

Dimitre Dimitrov*, Che Liang Tsai, Stefan Petrov, Vera Marinova, Dimitrina Petrova, Blagovest Napoleonov, Blagoy Blagoev, Velichka Strijkova, Ken-Yuh Hsu, Shiuan-Huei Lin

*此作品的通信作者

研究成果: Article同行評審

20 引文 斯高帕斯(Scopus)

摘要

The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown-AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices.

原文English
文章編號539
頁(從 - 到)1-11
頁數11
期刊Coatings
10
發行號6
DOIs
出版狀態Published - 6月 2020

指紋

深入研究「Atomic layer-deposited al-doped ZnO thin films for display applications」主題。共同形成了獨特的指紋。

引用此