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Assessing measurement noise effect in run-to-run process control: Extends EWMA controller by Kalman filter
Tzu Wei Kuo,
An-Chen Lee
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機械工程學系
研究成果
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引文 斯高帕斯(Scopus)
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Keyphrases
Analytical Results
12%
ARMA(1,1)
12%
Autoregressive Integrated Moving Average (ARIMA)
12%
Autoregressive Moving Average
12%
Closed-loop Stability
12%
Control Method
12%
Controller
100%
Deterministic Trend
12%
Disturbance Model
25%
Exponentially Weighted Moving Average
100%
Integrated Moving Average
12%
Kalman Filter
100%
Metrology Tool
12%
Model Modeling
12%
Moving Average Process
12%
Noise Effects
100%
Noise Measurement
100%
Output Properties
12%
Popular Control
12%
Process Disturbances
12%
Random Walk with Drift
12%
Run-to-run Process Control
100%
Semiconductor Process
12%
Steady State
12%
Engineering
Analytical Result
11%
Closed Loop
11%
Disturbance Model
22%
Filtration
11%
Kalman Filter
100%
Loop Stability
11%
Measurement Noise
100%
Moving Average
100%
Process Control
100%
Process Disturbance
11%
Simulation Result
11%