Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation

Yi Chiu*, Wei Zhi Huang, Jhong Wei Wu, Jin-Chern Chiou, Han Ping D. Shieh

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

Micro mirrors are assembled on silicon-on-insulator wafers using one-push operation. The proposed technique can reduce the overall complexity of micro system assembly by using automated equipments. Novel SU-8 mechanisms are also demonstrated.

原文American English
主出版物標題2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
發行者IEEE
頁面110-111
頁數2
ISBN(列印)9781424419180
DOIs
出版狀態Published - 23 10月 2008
事件2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS - Freiburg, Germany
持續時間: 11 8月 200814 8月 2008

出版系列

名字2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Conference

Conference2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
國家/地區Germany
城市Freiburg
期間11/08/0814/08/08

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