TY - JOUR
T1 - Applications of lasers
T2 - A promising route toward low-cost fabrication of high-efficiency full-color micro-LED displays
AU - Lai, Shouqiang
AU - Liu, Shibiao
AU - Li, Zilu
AU - Zhang, Zhening
AU - Chen, Zhong
AU - Zhang, Rong
AU - Kuo, Hao Chung
AU - Wu, Tingzhu
N1 - Publisher Copyright:
© The Author(s) 2023.
PY - 2023/10
Y1 - 2023/10
N2 - Micro-light-emitting diodes (micro-LEDs) with outstanding performance are promising candidates for next-generation displays. To achieve the application of high-resolution displays such as meta-displays, virtual reality, and wearable electronics, the size of LEDs must be reduced to the micro-scale. Thus, traditional technology cannot meet the demand during the processing of micro-LEDs. Recently, lasers with short-duration pulses have attracted attention because of their unique advantages during micro-LED processing such as noncontact processing, adjustable energy and speed of the laser beam, no cutting force acting on the devices, high efficiency, and low cost. Herein, we review the techniques and principles of laser-based technologies for micro-LED displays, including chip dicing, geometry shaping, annealing, laser-assisted bonding, laser lift-off, defect detection, laser repair, mass transfer, and optimization of quantum dot color conversion films. Moreover, the future prospects and challenges of laser-based techniques for micro-LED displays are discussed.
AB - Micro-light-emitting diodes (micro-LEDs) with outstanding performance are promising candidates for next-generation displays. To achieve the application of high-resolution displays such as meta-displays, virtual reality, and wearable electronics, the size of LEDs must be reduced to the micro-scale. Thus, traditional technology cannot meet the demand during the processing of micro-LEDs. Recently, lasers with short-duration pulses have attracted attention because of their unique advantages during micro-LED processing such as noncontact processing, adjustable energy and speed of the laser beam, no cutting force acting on the devices, high efficiency, and low cost. Herein, we review the techniques and principles of laser-based technologies for micro-LED displays, including chip dicing, geometry shaping, annealing, laser-assisted bonding, laser lift-off, defect detection, laser repair, mass transfer, and optimization of quantum dot color conversion films. Moreover, the future prospects and challenges of laser-based techniques for micro-LED displays are discussed.
KW - defective detection
KW - laser
KW - laser repair
KW - mass transfer
KW - micro-LED
KW - nano-processing
KW - quantum dot
UR - http://www.scopus.com/inward/record.url?scp=85182031565&partnerID=8YFLogxK
U2 - 10.29026/oes.2023.230028
DO - 10.29026/oes.2023.230028
M3 - Review article
AN - SCOPUS:85182031565
SN - 2097-0382
VL - 2
JO - Opto-Electronic Science
JF - Opto-Electronic Science
IS - 10
ER -