An interfacial investigation of high-dielectric constant material hafnium oxide on Si substrate

S. C. Chen*, J. C. Lou, Chao-Hsin Chien, Po-Tsun Liu, T. C. Chang

*此作品的通信作者

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24 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds