An Evaluation for Quality Inspection of Epitaxial Layer and Heavily-doped 4H-SiC Substrate by Simple Schottky Barrier Diode and MOS Capacitor
Kuan Wei Chu, Chun Wei Tseng, Bing Yue Tsui, Yew Chung Sermon Wu, Cheng Juei Yang, Chuck Hsu
研究成果: Conference contribution › 同行評審