An Evaluation for Quality Inspection of Epitaxial Layer and Heavily-doped 4H-SiC Substrate by Simple Schottky Barrier Diode and MOS Capacitor

Kuan Wei Chu, Chun Wei Tseng, Bing Yue Tsui, Yew Chung Sermon Wu, Cheng Juei Yang, Chuck Hsu

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Engineering & Materials Science