An ASIC-compatible EEPROM technology

S. R. Nariani*, Kuang Yeh Chang, M. Biegel, S. Kaylor, W. Boardman, Chen-Ming Hu

*此作品的通信作者

研究成果: Conference article同行評審

摘要

FLOTOX EEPROM is integrated into a 1.0μm CMOS ASIC environment, with minimum disturbance of the library devices. High field isolation, high junction breakdown and a manufacturable tunnel oxide module are made independent of the ASIC process and its future scaling, through process innovations. An ASIC automotive part using this EEPROM is demonstrated.

原文English
文章編號5727316
期刊Proceedings of the Custom Integrated Circuits Conference
DOIs
出版狀態Published - 1 十二月 1992
事件14th Annual Custom Integrated Circuits Conference, CICC 1992 - Boston, MA, United States
持續時間: 3 五月 19926 五月 1992

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