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An analytical model for calculating the pull-in voltage of micro cantilever beams subjected to tilted and curled effects
Yuan Te Huang, He Ling Chen,
Wen-Syang Hsu
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機械工程學系
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引文 斯高帕斯(Scopus)
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Keyphrases
Analytical Model
100%
Micro-cantilever Beam
100%
Pull-in Voltage
100%
Cantilever Beam
40%
Residual Deformation
40%
Polysilicon
20%
Residual Stress
20%
Measurement Results
20%
Analytical Results
20%
Tilt Angle
20%
Microdevice
20%
Radius of Curvature
20%
Surface Micromachining Process
20%
Accuracy Improvement
20%
White Light Interferometer
20%
Silicon Cantilever
20%
Fundamental Phenomena
20%
Gradient Stress
20%
Deformation Function
20%
Stress-only
20%
Curvature Angle
20%
Engineering
Analytical Model
100%
Cantilever Beam
100%
Micro-Cantilevers
100%
Pull-in Voltage
100%
Residual Stress
20%
Analytical Result
20%
Surface Micro-Machining
20%
Accuracy Improvement
20%
Stress Gradient
20%
Deformation Function
20%
Material Science
Residual Stress
100%
Silicon
100%
Micromachining
100%
Interferometer
100%
Surface (Surface Science)
100%