An accurate hot carrier reliability monitor for deep-submicron shallow S/D junction thin gate oxide n-MOSFET's

Steve S. Chung*, S. J. Chen, C. M. Yih, W. J. Yang, Tien-Sheng Chao

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

In this paper, an accurate criterion has been proposed for reliability evaluation of state-of-the-art deep-submicron S/D extension n-MOSFET's. A new monitor for HC reliability evaluation has been developed using total values of Nit in the effective channel length region, instead of commonly used substrate current(IB), impact ionization rate (ID/IB), or peak/average Nit values. An accurate degradation model has thus been developed based on the Nit distribution and mobility scattering effect. Moreover, this approach has been successfully used to demonstrate the feasibility for gate-engineering studies.

原文English
主出版物標題Annual Proceedings - Reliability Physics (Symposium)
發行者IEEE
頁面249-252
頁數4
ISBN(列印)0780352203
DOIs
出版狀態Published - 1 1月 1999
事件Proceedings of the 1999 37th Annual IEEE International Reliability Physics Symposium - San Diego, CA, USA
持續時間: 23 3月 199925 3月 1999

出版系列

名字Annual Proceedings - Reliability Physics (Symposium)
ISSN(列印)0099-9512

Conference

ConferenceProceedings of the 1999 37th Annual IEEE International Reliability Physics Symposium
城市San Diego, CA, USA
期間23/03/9925/03/99

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