Advanced damage-free neutral beam etching technology to texture Si wafer with honeycomb pattern for broadband light trapping in photovoltaics

Keyphrases

• Silicon Wafer 100%
• Etching Technology 100%
• Honeycomb-like 100%
• Surface Reflection 100%
• Neutral Beam Etching 100%
• Damage-free 100%
• Broadband Light Trapping 100%
• Etching Rate 40%
• Etch Profile 40%
• Minimal Surfaces 40%
• Low Power Consumption 20%
• Sidewall 20%
• Wavelength Range 20%
• Front Surface 20%
• Light Absorption 20%
• Surface Pattern 20%
• Anisotropy 20%
• Antireflection Coating 20%
• Solar Cell Applications 20%
• Etching Process 20%
• Surface Texture 20%
• Surface Potential 20%
• Etching Time 20%
• Wafer Thickness 20%
• SF6 Gas 20%
• Resist Pattern 20%
• Silicon Etching 20%
• Anisotropic Etching 20%
• Gas Chemistry 20%
• High Efficiency Silicon Solar Cells 20%

Engineering

• Photovoltaics 100%
• Silicon Wafer 100%
• Solar Cell 100%
• Side Wall 50%
• Texturing 50%
• Anisotropic 50%
• Light Absorption 50%
• Front Surface 50%
• Surface Profile 50%

Material Science

• Photovoltaics 100%
• Silicon Wafer 100%
• Surface (Surface Science) 100%
• Silicon 28%
• Density 14%
• Electronic Circuit 14%
• Solar Cell 14%
• Anisotropy 14%
• Antireflection Coating 14%
• Silicon Solar Cell 14%