Achieving high-performance poly-Si TFTs by structural engineering

Chen Ming Lee*, Chih Fu Lien, Bing-Yue Tsui

*此作品的通信作者

    研究成果: Conference contribution同行評審

    摘要

    The device performance of various state-of-the-art poly-Si TFTs are reviewed and compared in this paper. Several performance-enhancing methods are also discussed in detail and integrated together to fabricate the high-performance poly-Si TFTs. These experimental results reveal the possibility to realize the poly-Si-based integrated circuits in the future.

    原文English
    主出版物標題4th IEEE International NanoElectronics Conference, INEC 2011
    DOIs
    出版狀態Published - 26 9月 2011
    事件4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, Taiwan
    持續時間: 21 6月 201124 6月 2011

    出版系列

    名字Proceedings - International NanoElectronics Conference, INEC
    ISSN(列印)2159-3523

    Conference

    Conference4th IEEE International Nanoelectronics Conference, INEC 2011
    國家/地區Taiwan
    城市Tao-Yuan
    期間21/06/1124/06/11

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