Abruptness of Ge composition at the Si/SiGe interface grown by ultrahigh vacuum chemical vapor deposition

W. C. Tsai*, C. Y. Chang, T. G. Jung, T. S. Liou, G. W. Huang, T. C. Chang, L. P. Chen, Horng-Chih Lin

*此作品的通信作者

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

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Keyphrases

Engineering

Physics

Material Science