Ab Initio Chemical Kinetics for SiHx Reactions with Si2Hy (x = 1,2,3,4; y = 6,5,4,3; x + y = 7) under a-Si:H CVD Condition

Trong Nghia Nguyen, Ming-Chang Lin*

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4 引文 斯高帕斯(Scopus)

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Chemical Compounds

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Medicine & Life Sciences