Ab initio chemical kinetics for SiH2 + Si2H 6 and SiH3 + Si2H5 Reactions and the related unimolecular decomposition of Si3H8 under a-Si/H CVD conditions

P. Raghunath, Ming-Chang Lin*

*此作品的通信作者

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12 引文 斯高帕斯(Scopus)

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Physics & Astronomy

Chemical Compounds