A TSV-based heterogeneous integrated neural-signal recording device with microprobe array

Lei Chun Chou, Shih Wei Lee, Chuan An Cheng, Po-Tsang Huang, Chih Wei Chang, Cheng Hao Chiang, Shang Lin Wu, Ching Te Chuang, Jin-Chern Chiou, Wei Hwang, Chung Hsi Wu, Kuo Hua Chen, Chi Tsung Chiu, Ho Ming Tong, Kuan-Neng Chen