A three-dimensional simulation of electrostatic characteristics for carbon nanotube array field effect transistors

Yi-Ming Li*, Hung Mu Chou, Jam Wem Lee, Bo Shian Lee

*此作品的通信作者

研究成果: Conference article同行評審

10 引文 斯高帕斯(Scopus)

摘要

We, in this paper, study the electrostatic characteristics and the gate capacitances for carbon nanotube (CNT) array field effect transistors (FETs). The explored CNT-array FET is with three configurations of gate electrode, the top gate, the wrap around gate, and the bottom gate. Taking the pitch distance of structures and the gate length of CNT FET into consideration, a three-dimensional (3D) electrostatic simulation are performed by using an adaptive finite volume method, where different gate capacitance are calculated and compared. It is found that there is at least a 20% difference in calculating the gate capacitance between the 2D and 3D modeling and simulations. Our 3D simulation shows that a wrap around gate gives the largest gate capacitance among structures. A bottom gate possesses the weakest gate controllability. Effects of the pitch distance and the gate length on the gate capacitances of CNT-array FET are investigated. Results of the 3D electrostatic simulations can be applied to estimate the magnitude of the on-current of CNT FETs.

原文English
頁(從 - 到)434-440
頁數7
期刊Microelectronic Engineering
81
發行號2-4
DOIs
出版狀態Published - 8月 2005
事件The Proceedings of the 2nd International Symposium on Nano- and Giga-Challenges in Microelectronics -
持續時間: 12 9月 200417 9月 2004

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