A study of mechanical lift-off technology for high- efficiency vertical leds using micro-porous gan template

Chia Yu Lee, Da Wei Lin, Che Yu Liu, Shih Chieh Hsu, Hao-Chung Kuo*, Shing Chung Wang, Chun Yen Chang

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

The high efficiency vertical light emitting diodes (V-LEDs) using mechanical lift-off with Micro-Porous GaN template formed by high temperature molten KOH wet etching process were demonstrated. The average threading dislocation density (TDD) of u-GaN after regrowth was estimated by transmission electron microscopy (TEM) reduced from 2×109 to 1×108 cm-2. The sapphire substrate was easily removed by mechanical lift-off during wafer bonding process. The light output of V-LEDs are greatly enhanced by 100% compared with Conventional-LEDs at an operating current of 20mA due to the high quality thin GaN and excellent heating dissipation.

原文English
主出版物標題Conference on Lasers and Electro Optics, CLEO
主出版物子標題Applications and Technology, CLEO_AT 2013
DOIs
出版狀態Published - 19 11月 2013
事件CLEO: Applications and Technology, CLEO_AT 2013 - San Jose, CA, 美國
持續時間: 9 6月 201314 6月 2013

出版系列

名字CLEO: Applications and Technology, CLEO_AT 2013

Conference

ConferenceCLEO: Applications and Technology, CLEO_AT 2013
國家/地區美國
城市San Jose, CA
期間9/06/1314/06/13

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