A Programmable CMOS Dielectrophoresis Array Chip with 128 × 128 Electrodes for Cell Manipulation

Dielectrophoresis (DEP) is a powerful technique for manipulating biological cells. Yet, its widespread application has been limited by traditional glass-based chips with static electrode configurations that often require integrated microfluidic systems. This paper presents a novel DEP array chip fabricated in a standard CMOS process, featuring a 128 × 128 electrode matrix capable of generating dynamic, programmable electric field patterns that can be tailored to meet specific requirements for different use cases. Experiments have demonstrated the ability of the chip to manipulate fibroblast and THP-1 cells, with fibroblast movement observed at a velocity of 10μm/s with a DEP frequency of 800kHz and a peak-to-peak DEP voltage of 1.8V. The chip is designed for compatibility with standard petri dishes, obviating the requirement for microfluidics and facilitating its integration with traditional cell culture protocols. Our results indicate the chip's potential as a versatile tool for cell biology research and applications.