A photovoltaic PN-junction vertical comb-drive micro-actuator

Hsin Yu Huang, Hsiu Ting Hsu, Hung Yi Lin, Yi Chiu, Jin-Chern Chiou, Weileun Fang*

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

This study reports a novel electrostatic vertical comb-drive micro-actuator (VCA) driven by the photovoltaic effect that results from the incident light. The vertical comb electrodes are composed of pn-junction structures (named PN-combs). The VCA with PN-combs can be driven by the photovoltaic effect and/or reverse electrical bias. The VCA with PN-combs was fabricated on an epitaxial silicon wafer and successfully driven by intensity-modulated laser light and reverse bias. The combination of the photovoltaic effect and reverse bias can further increase the mechanical scan angle of the VCA. Experiments demonstrate the feasibility of four driving methods, including optical driving, optical driving with DC reverse bias, electrical driving and electrical driving with DC photovoltaic voltage.

原文American English
主出版物標題TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
發行者IEEE
頁面1513-1516
頁數4
ISBN(電子)978-1-4244-4193-8
ISBN(列印)9781424441938
DOIs
出版狀態Published - 11 12月 2009
事件TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
持續時間: 21 6月 200925 6月 2009

出版系列

名字TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

ConferenceTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
國家/地區United States
城市Denver, CO
期間21/06/0925/06/09

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