A novel thermal switch design by using CMOS MEMS fabrication process

Lei Chun Chou*, You Liang Lai, Ying Zong Juang, Chun Yin Tsai, Chun Ying Lin, Sheng-Chieh Huang, Jin-Chern Chiou

*此作品的通信作者

研究成果: Conference contribution › 同行評審

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Keyphrases

Material Science

Engineering

Chemical Engineering