A novel suspension design for MEMS sensing device to eliminate planar spring constants mismatch

Kai Yu Jiang*, He Ling Chen, Wen-Syang Hsu, Yueh Kang Lee, Yen Wu Miao, Yi Chueh Shieh, Chen Yuan Hung

*此作品的通信作者

研究成果: Conference contribution › 同行評審

1 引文 斯高帕斯（Scopus）

指紋

深入研究「A novel suspension design for MEMS sensing device to eliminate planar spring constants mismatch」主題。共同形成了獨特的指紋。

Keyphrases

Engineering