@inproceedings{4f96055c6af04997afcdcfbb386f200f,
title = "A novel suspension design for MEMS sensing device to eliminate planar spring constants mismatch",
abstract = "This paper presents a new suspension design for planar MEMS sensing devices. The new design includes four coil springs which are symmetrically arranged with respect to the center of the proof mass with 90-degree orientation difference. The proposed coil spring design is found to take less area to achieve similar spring constant than the conventional serpentine spring design. Furthermore, the proposed symmetrical-to-center arrangement on suspension can reduce spring constants mismatch between X and Y axes, even under beam width deviation due to fabrication resolution. This concept is realized and verified by experimental results from two-axis capacitive accelerometers through a polysilicon-based CMOS fabrication platform.",
author = "Jiang, {Kai Yu} and Chen, {He Ling} and Wen-Syang Hsu and Lee, {Yueh Kang} and Miao, {Yen Wu} and Shieh, {Yi Chueh} and Hung, {Chen Yuan}",
year = "2012",
month = dec,
day = "1",
doi = "10.1109/ICSENS.2012.6411145",
language = "English",
isbn = "9781457717659",
series = "Proceedings of IEEE Sensors",
booktitle = "IEEE SENSORS 2012 - Proceedings",
note = "11th IEEE SENSORS 2012 Conference ; Conference date: 28-10-2012 Through 31-10-2012",
}