A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism

Sheng-Chieh Huang*, Shao-Kang Hung, Mei Yung Chen, Chih Hsien Lin, Li Chen Fu

*此作品的通信作者

研究成果: Conference contribution同行評審

1 引文 斯高帕斯(Scopus)

摘要

In this paper, we present a novel mechanism and system implementation of six degree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3mm×3mm×4mm with a positioning resolution of±10μm, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.

原文English
主出版物標題Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
頁面822-827
頁數6
DOIs
出版狀態Published - 2007
事件33rd Annual Conference of the IEEE Industrial Electronics Society, IECON - Taipei, Taiwan
持續時間: 5 11月 20078 11月 2007

出版系列

名字IECON Proceedings (Industrial Electronics Conference)

Conference

Conference33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
國家/地區Taiwan
城市Taipei
期間5/11/078/11/07

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