TY - GEN
T1 - A novel six-DOF electromagnetic precision positioner utilizing hybrid magnetic and fluid mechanism
AU - Huang, Sheng-Chieh
AU - Hung, Shao-Kang
AU - Chen, Mei Yung
AU - Lin, Chih Hsien
AU - Fu, Li Chen
PY - 2007/12/1
Y1 - 2007/12/1
N2 - In this paper, we present a novel mechanism and system implementation of six degree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3mm×3mm×4mm with a positioning resolution of±10μm, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.
AB - In this paper, we present a novel mechanism and system implementation of six degree-of-freedom (DOF) electromagnetic-actuating positioner. The design of a novel mechanism utilizes hybrid magnetic and fluid mechanism to achieve two goals: 1) sufficient damping, 2) balancing the weight of the carrier utilizing buoyancy of fluid and achieving low power consumption. The novel mechanism and electromagnetic actuators are combined and the overall dynamic model is also derived. The positioner presented herein shows a large travel range of 3mm×3mm×4mm with a positioning resolution of±10μm, which is close to the limit of the equipped sensors. We demonstrate the satisfactory performance of the positioner, with precision, theoretical analysis and experimental results.
KW - Hybrid magnetic and fluid mechanism
KW - Positioner
KW - Precision motion control
UR - http://www.scopus.com/inward/record.url?scp=49949107922&partnerID=8YFLogxK
U2 - 10.1109/IECON.2007.4460161
DO - 10.1109/IECON.2007.4460161
M3 - Conference contribution
AN - SCOPUS:49949107922
SN - 1424407834
SN - 9781424407835
T3 - IECON Proceedings (Industrial Electronics Conference)
SP - 822
EP - 827
BT - Proceedings of the 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
T2 - 33rd Annual Conference of the IEEE Industrial Electronics Society, IECON
Y2 - 5 November 2007 through 8 November 2007
ER -