A novel photoresist-based film-profile engineering scheme for fabricating double-gated, recess-channel IGZO thin-film transistors

Yu An Huang, Kang Pin Peng, Yu Chiao Meng, Chun Jung Su, Pei-Wen Li, Horng-Chih Lin

研究成果: Article › 同行評審

1 引文 斯高帕斯（Scopus）

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Physics & Astronomy

Engineering & Materials Science