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A Novel Optical Proximity Correction Machine Learning Model Using a Single-Flow Convolutional Feedback Networks With Customized Attention

  • Ching Hsuan Huang
  • , Han Chun Tung
  • , Yen Wei Feng
  • , Hung Tse Hsu
  • , Hsueh Li Liu
  • , Albert Lin*
  • , Peichen Yu*
    • *此作品的通信作者

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Computer Science

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Earth and Planetary Sciences