A novel nanoinjection lithography (NInL) technology and its application for 16-nm node device fabrication

Hou Yu Chen*, Chun Chi Chen, Fu Kuo Hsueh, Jan Tsai Liu, Shyi Long Shy, Cheng San Wu, Chao-Hsin Chien, Chen-Ming Hu, Chien Chao Huang, Fu Liang Yang

*此作品的通信作者

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds