@inproceedings{528caa8cb08542bb8cc53d27962a4c33,
title = "A novel fabrication method of microlens array by surface tension and injection process",
abstract = "A novel and simple method on fabricating Ultra-Violet curable polymer microlens array on silicon membrane and cantilever by injection process is presented. The radius of curvature of microlens can be tuned by liquid polymer surface tension and applied pressure. The polymer microlens array, with a diameter of 17μ m, a pitch of 30 μ m on silicon membrane and cantilever are successfully fabricated to demonstrate the feasibility of the proposed method. Also, it is shown that different curvature radius of microlens can be fabricated, and the proposed method has potential to integrate with other optical device.",
keywords = "Injection, Optical device, Polymer microlens, Surface tension",
author = "Lin, {Yu Hsin} and Wen-Syang Hsu",
year = "2007",
doi = "10.1109/NEMS.2007.352055",
language = "English",
isbn = "1424406102",
series = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",
pages = "443--446",
booktitle = "Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007",
note = "2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 ; Conference date: 16-01-2007 Through 19-01-2007",
}