A new gas bio-sensor in the structure of a micro-machined clamped-clamped inertial beam and its readout circuit

Bing Ze Xue, Chang-Po Chao, Bor-Shyh Lin, Chun Yin Tsai, Tsung-Lin Chen, Hsin Hao Liao, Hann Huei Tsai, Ying Zong Juang

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Engineering