A new gas bio-sensor in the structure of a micro-machined clamped-clamped inertial beam and its readout circuit

Keyphrases

• Micromachining 100%
• Readout Circuit 100%
• Clamped-clamped 100%
• Phase Difference 66%
• Resonator 66%
• Square Wave 66%
• Piezoresistivity 66%
• Wheatstone Bridge Circuit 66%
• Instrumentation Amplifier 33%
• System-on-chip 33%
• Reference Signal 33%
• Power Amplifier 33%
• Adapter 33%
• Micro-scaled 33%
• Microcontroller 33%
• Gas Concentration 33%
• RS232 33%
• Gas Molecules 33%
• Chip Package 33%
• Feedthrough 33%
• Piezoresistive Sensing 33%
• Conversion Circuit 33%
• Thermal Actuation 33%
• Clamped Beam 33%
• Wave Conversion 33%
• Phase Detector 33%
• Front-end Converter 33%
• Wave Converter 33%
• Reduction Unit 33%

Engineering

• Biosensor 100%
• Readout Circuit 100%
• Resonator 66%
• Phase Difference 66%
• Bridge Circuits 66%
• Wheatstone Bridge 66%
• System-on-Chip 33%
• Front End 33%
• Instrumentation Amplifier 33%
• Actuation 33%
• Resistive 33%
• Reference Signal 33%
• Power Amplifier 33%
• One Step 33%
• Microcontroller 33%
• Gas Molecule 33%
• Process Step 33%
• Phase Detector 33%