@inproceedings{0c06e2f69b914a678a8dd613c9c6b7f3,
title = "A new design of 3-DOF flexure-mechanism positioner with electromagnetic technology",
abstract = "In this paper, We present the design, control and implementation of a novel, compact and three degree-offreedom (DOF) precise flexure-mechanism electromagnetic-actuating positioning system with submocrometer-scale precise positioning capability and millimeter-level large travel range. The design of the positioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and the eddy-current sensors to achieve the 3-DOF motion. The positioner presented herein shows the planar travel range of 1mm×1mm with a position resolution of ±300 nm. To let the compact system be more robust and stable in positioning, we propose an adaptive sliding-mode controller. We will demonstrate the satisfactory performance of the positioning system, including stiffness and precision, with theoretical analysis and experimental results.",
keywords = "Adaptive controller, Parallel flexure mechanism, Positioner, Precision positioning",
author = "Wu, {Zhao Kai} and Chen, {Mei Yung} and Shao-Kang Hung and Sheng-Chieh Huang and Fu, {Li Chen}",
year = "2006",
doi = "10.1109/CDC.2006.377024",
language = "English",
isbn = "1424401712",
series = "Proceedings of the IEEE Conference on Decision and Control",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "603--608",
booktitle = "Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC",
address = "美國",
note = "45th IEEE Conference on Decision and Control 2006, CDC ; Conference date: 13-12-2006 Through 15-12-2006",
}