A new design of 3-DOF flexure-mechanism positioner with electromagnetic technology

Zhao Kai Wu*, Mei Yung Chen, Shao-Kang Hung, Sheng-Chieh Huang, Li Chen Fu

*此作品的通信作者

研究成果: Conference contribution同行評審

3 引文 斯高帕斯(Scopus)

摘要

In this paper, We present the design, control and implementation of a novel, compact and three degree-offreedom (DOF) precise flexure-mechanism electromagnetic-actuating positioning system with submocrometer-scale precise positioning capability and millimeter-level large travel range. The design of the positioner utilizes the monolithic parallel flexure mechanism with the built-in electromagnetic actuators and the eddy-current sensors to achieve the 3-DOF motion. The positioner presented herein shows the planar travel range of 1mm×1mm with a position resolution of ±300 nm. To let the compact system be more robust and stable in positioning, we propose an adaptive sliding-mode controller. We will demonstrate the satisfactory performance of the positioning system, including stiffness and precision, with theoretical analysis and experimental results.

原文English
主出版物標題Proceedings of the 45th IEEE Conference on Decision and Control 2006, CDC
發行者Institute of Electrical and Electronics Engineers Inc.
頁面603-608
頁數6
ISBN(列印)1424401712, 9781424401710
DOIs
出版狀態Published - 2006
事件45th IEEE Conference on Decision and Control 2006, CDC - San Diego, CA, United States
持續時間: 13 12月 200615 12月 2006

出版系列

名字Proceedings of the IEEE Conference on Decision and Control
ISSN(列印)0743-1546
ISSN(電子)2576-2370

Conference

Conference45th IEEE Conference on Decision and Control 2006, CDC
國家/地區United States
城市San Diego, CA
期間13/12/0615/12/06

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