A new and simple DC method for thermal-resistance extraction of scaled FinFET devices

Wei Cheng Huang*, Pin Su

*此作品的通信作者

研究成果: Conference contribution同行評審

摘要

This work proposes a new and simple hot-chuck measurement method for the extraction of the thermal resistance of FinFETs. The intrinsic transconductance that eliminates the parasitic source/drain resistance effect can serve as a temperature sensor to characterize the device temperature rise due to self-heating. Our method requires only DC measurements without the need of special test structures.

原文English
主出版物標題2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018
發行者Institute of Electrical and Electronics Engineers Inc.
頁面1-2
頁數2
ISBN(電子)9781538648254
DOIs
出版狀態Published - 3 7月 2018
事件2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018 - Hsinchu, 台灣
持續時間: 16 4月 201819 4月 2018

出版系列

名字2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018

Conference

Conference2018 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2018
國家/地區台灣
城市Hsinchu
期間16/04/1819/04/18

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